Course Manual RM
Scanning Microscopy
PDF Course Catalog Deutsche Version: RM
Version: 1 | Last Change: 30.10.2019 17:00 | Draft: 0 | Status: vom verantwortlichen Dozent freigegeben
| Long name | Scanning Microscopy |
|---|---|
| Approving CModule | RM_MaET |
| Responsible |
Prof. Dr. Stefan Altmeyer
Professor Fakultät IME |
| Valid from | winter semester 2020/21 |
| Level | Master |
| Semester in the year | winter semester |
| Duration | Semester |
| Hours in self-study | 114 |
| ECTS | 5 |
| Professors |
Prof. Dr. Stefan Altmeyer
Professor Fakultät IME |
| Requirements | mathematics: differential- and integral calculus complex numbers vector calculus basics of differential geometry physics / optics: geometrical optics wave optics |
| Language | German |
| Separate final exam | Yes |
Literature
| Reimer: Scanning Electron Microscopy (Springer) |
| Meyer, Hug, Bennewitz: Scanning Probe Microscopy (Springer) |
| Wilhelm, Gröbler, Gluch, Heinz: Die konfokale Laser Scanning Mikroskopie (Carl Zeiss) |
Final exam
| Details |
As long as the number of participants is not too high, oral examination is preferred of written exams. To a small amount, the lowest competence level, knowledge, is checked. This could be e.g. the different types of cathodes in electron microscopes, which lead to different classes of instruments or it could be a question regarding the different building principles of confocal measurement setups. The next competence level is related to skills. Examination could be done by showing the sketch of a setup and it has to be devided into different functional groups and the critical aspects in each group has to be identified. Another skill to be tested could be to start from the Lorenz force and show, why charged particles don't change their energy in magnetic fields. The highest competence level adressed is methodical expertise. It can be checked by the discussion of a real world task: More scientific tasks could be to give a justified explaination, if the construction of an electron microscope with a certain acceleration voltage needs relativistic calculation or not. Another question could be if quantum effects have to be taken into account or not when dealing with a certain type of cathode system. More practical oriented questions could regard a measurement task in 3D topography and it has to be explained, what measurement principle could be chosen for this task and which one not. A guided discussion is very well suited to find out, if the underlying principles are understood and can be applied correctly, if scientific transfer is possible and how much overview there is. |
|---|---|
| Minimum standard | Correct answer of at least 50 % of the questions |
| Exam Type | EN mündliche Prüfung, strukturierte Befragung |
Learning goals
| Goal type | Description |
|---|---|
| Knowledge | electron microscopy wave-particle dualism of electrons, De Brogli wavelength reletivistic mass increas resolution of electron optical systems depth of field in an electron microscope electron emission physics of electron emission thermoionic emission Schottky emission field emission technical construction of electron emitters brigthness as a conserving magnitude magentic deflection units focussing lens equations of motion for electrons in focussing lenses principles of aberration minimization scan system electron matter interaction primary electrons secondary electrons Auger electrons Bremsstrahlung characteristic x rays cathodo luminescence Everhart-Thornley detector electron contrast topography contrast material contrast lattice orientation contrast conductivity contrast applications and limitations tunneling microscope wave function definition continuity and continuous differentiable probability interpretation principle potential diagram Fermi level work function quantummechanical calculation of the tunneling probability biased tunneling barrier and WKB approximation piezo motors physical principles nonlinearity, hysteresis, creep principles of control theory in a tunneling microscope preparation of tunneling tips image as result of a measurement convolution of object and tip lattive resolution and atomic resolution applications and limits atomic force microscope setup types: contact mode, noncontact mode, tapping mode, magnetic mode, applications and limits confocal microscopy principle of confocal apertures principle of optical sectioning lateral and axial resolution pupil illumination and over-illumination in concofal laser scanning microscopes problems of adjustment Nipkow disc freedom of adjustment light budget and reflections rotating microlens array confocal dispersion sensor applications and limits |
| Skills | electron micorscope calculate classical and relativistic electron speeds calculate wavelngths of electron calculate resolution of electron optical systems explain the different emission regimes explain the different electron-matter interaction processes sketch and explain the different types of electron lenses sketch and explain an Everhart-Thornley detector calculate the depth of field in an electron microscope tunneling microscope sketch and explain the potential over space diagram for tunneling explain the Ansatz to calculate the tunneling probability explain the difference between atomic- and lattice resolution |
Expenditure classroom teaching
| Type | Attendance (h/Wk.) |
|---|---|
| Lecture | 0 |
| Exercises (whole course) | 0 |
| Exercises (shared course) | 0 |
| Tutorial (voluntary) | 0 |
Special requirements
| none |
| Accompanying material | lecture notes as downloadable file |
|---|---|
| Separate exam | No |
Learning goals
| Goal type | Description |
|---|---|
| Skills | Adjustment and use of electron microscopes tunneling microscopes atomic force microscopes confocal micorscopes perform a metrological task measurement of hights measurement of 3D topographies structural analysis finding ultimate resolution limits interpretation of metrological findings |
Expenditure classroom teaching
| Type | Attendance (h/Wk.) |
|---|---|
| Practical training | 2 |
| Tutorial (voluntary) | 0 |
Special requirements
| none |
| Accompanying material | none |
|---|---|
| Separate exam | Yes |
Separate exam
| Exam Type | EN Projektaufgabe im Team bearbeiten (z.B. im Praktikum) |
|---|---|
| Details | Accopmpaning the execution of the metrological task Examination of the theoretical background regarding the underlying principles of the instrumentation and the application Examination of the results regarding the technical level of the experimental process and the scientific level of the analysis and interpretation. |
| Minimum standard | All experimentals tasks have been performed. In all experiments a level of understanding is achieved, that a use of the instrumention all alone is possible. At least 50 % of the images and measurement results would be, if given in an industrial or scientific context, regarded as sufficient and problem solved. |
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