Course Manual MNST
Micro and nano systems
PDF Course Catalog Deutsche Version: MNST
Version: 1 | Last Change: 03.11.2019 19:17 | Draft: 0 | Status: vom verantwortlichen Dozent freigegeben
| Long name | Micro and nano systems |
|---|---|
| Approving CModule | MNST_MaET |
| Responsible |
Prof. Dr. Karl Kohlhof
Professor Fakultät IME |
| Valid from | winter semester 2020/21 |
| Level | Master |
| Semester in the year | winter semester |
| Duration | Semester |
| Hours in self-study | 78 |
| ECTS | 5 |
| Professors |
Prof. Dr. Karl Kohlhof
Professor Fakultät IME |
| Requirements | Basic knowledge of material science desired |
| Language | German |
| Separate final exam | Yes |
Literature
| W. Menz, P. Bley: "Mikrosystemtechnik für Ingenieure", VCH Verlagsgesellschaft |
| S. Büttgenbach: "Mikromechanik", Teubner Verlag |
Final exam
| Details | Oral seminar presentation |
|---|---|
| Minimum standard | Grade 4.0 |
| Exam Type | EN mündlicher Ergebnisbericht (Vortrag / Präsentation) |
Learning goals
| Goal type | Description |
|---|---|
| Knowledge | Introduction Micro systems at market Production principles and strategies |
| Knowledge | Sensors and actuators Signal transformation Materials |
| Knowledge | Production technologies Clean room Lithography, micro structuring Thermal procsses Thin film techologies Construction techniques Mass production |
| Knowledge | Design and simulation MEMSPro - Spice based circuit simulation ANSYS - Finite element simulation of physical processes |
| Knowledge | Applications Micro pump, micro valve, ink jet head Micro motor Acceleration sensors, gear rate sensor Micro cimate sensor Micro mirror display / digital light processor Micro sensors in smart phones |
| Skills | Selection of known micro / nano procduction concepts |
| Skills | strategic integration of mico and nano technologies |
| Skills | structured design and simulation of micro / nano systems |
| Skills | Seminar talk: research, preparation, structuring, presentation |
| Skills | simulation of micro / nano systems |
Expenditure classroom teaching
| Type | Attendance (h/Wk.) |
|---|---|
| Lecture | 2 |
| Exercises (whole course) | 0 |
| Exercises (shared course) | 0 |
| Tutorial (voluntary) | 0 |
Special requirements
| Physics, Material science |
| Accompanying material |
electronic pdf-script to presentation, electronic design and simulation tools MEMSPro |
|---|---|
| Separate exam | Yes |
Separate exam
| Exam Type | EN Fachgespräch (Interview) zu besonderen Fragestellungen (Szenario, Projektaufgabe, Lieraturrecherche) |
|---|---|
| Details | Presentation of result of literature reseach |
| Minimum standard | Approve |
Learning goals
| Goal type | Description |
|---|---|
| Knowledge | Presentation structure |
| Skills | Scientific research tools |
| Skills | Scientific citation |
| Skills | Literatur research to given topic |
| Skills | Structuring, preparation and oral presentation of scientific talk |
Expenditure classroom teaching
| Type | Attendance (h/Wk.) |
|---|---|
| Seminar | 2 |
| Tutorial (voluntary) | 0 |
Special requirements
| Knowlewdge in physics, material science desired |
| Accompanying material | undefined |
|---|---|
| Separate exam | Yes |
Separate exam
| Exam Type | EN Projektaufgabe im Team bearbeiten (z.B. im Praktikum) |
|---|---|
| Details | Structuring of presentation |
| Minimum standard | Grade 4.0 |
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