Micro and nano systems
PDF Course Catalog Deutsche Version: MNST
Version: 1 | Last Change: 03.11.2019 19:17 | Draft: 0 | Status: vom verantwortlichen Dozent freigegeben
Long name | Micro and nano systems |
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Approving CModule | MNST_MaET |
Responsible |
Prof. Dr. Karl Kohlhof
Professor Fakultät IME |
Valid from | winter semester 2020/21 |
Level | Master |
Semester in the year | winter semester |
Duration | Semester |
Hours in self-study | 78 |
ECTS | 5 |
Professors |
Prof. Dr. Karl Kohlhof
Professor Fakultät IME |
Requirements | Basic knowledge of material science desired |
Language | German |
Separate final exam | Yes |
W. Menz, P. Bley: "Mikrosystemtechnik für Ingenieure", VCH Verlagsgesellschaft |
S. Büttgenbach: "Mikromechanik", Teubner Verlag |
Details | Oral seminar presentation |
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Minimum standard | Grade 4.0 |
Exam Type | EN mündlicher Ergebnisbericht (Vortrag / Präsentation) |
Goal type | Description |
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Knowledge | Introduction Micro systems at market Production principles and strategies |
Knowledge | Sensors and actuators Signal transformation Materials |
Knowledge | Production technologies Clean room Lithography, micro structuring Thermal procsses Thin film techologies Construction techniques Mass production |
Knowledge | Design and simulation MEMSPro - Spice based circuit simulation ANSYS - Finite element simulation of physical processes |
Knowledge | Applications Micro pump, micro valve, ink jet head Micro motor Acceleration sensors, gear rate sensor Micro cimate sensor Micro mirror display / digital light processor Micro sensors in smart phones |
Skills | Selection of known micro / nano procduction concepts |
Skills | strategic integration of mico and nano technologies |
Skills | structured design and simulation of micro / nano systems |
Skills | Seminar talk: research, preparation, structuring, presentation |
Skills | simulation of micro / nano systems |
Type | Attendance (h/Wk.) |
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Lecture | 2 |
Exercises (whole course) | 0 |
Exercises (shared course) | 0 |
Tutorial (voluntary) | 0 |
Physics, Material science |
Accompanying material |
electronic pdf-script to presentation, electronic design and simulation tools MEMSPro |
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Separate exam | Yes |
Exam Type | EN Fachgespräch (Interview) zu besonderen Fragestellungen (Szenario, Projektaufgabe, Lieraturrecherche) |
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Details | Presentation of result of literature reseach |
Minimum standard | Approve |
Goal type | Description |
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Knowledge | Presentation structure |
Skills | Scientific research tools |
Skills | Scientific citation |
Skills | Literatur research to given topic |
Skills | Structuring, preparation and oral presentation of scientific talk |
Type | Attendance (h/Wk.) |
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Seminar | 2 |
Tutorial (voluntary) | 0 |
Knowlewdge in physics, material science desired |
Accompanying material | undefined |
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Separate exam | Yes |
Exam Type | EN Projektaufgabe im Team bearbeiten (z.B. im Praktikum) |
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Details | Structuring of presentation |
Minimum standard | Grade 4.0 |
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