Course

MNST - Micro and nano systems


PDF Course Catalog Deutsche Version: MNST

Version: 1 | Last Change: 03.11.2019 19:17 | Draft: 0 | Status: vom verantwortlichen Dozent freigegeben

Long name Micro and nano systems
Approving CModule MNST_MaET
Responsible
Prof. Dr. Karl Kohlhof
Professor Fakultät IME
Level Master
Semester in the year winter semester
Duration Semester
Hours in self-study 78
ECTS 5
Professors
Prof. Dr. Karl Kohlhof
Professor Fakultät IME
Requirements Basic knowledge of material science desired
Language German
Separate final exam Yes
Literature
W. Menz, P. Bley: "Mikrosystemtechnik für Ingenieure", VCH Verlagsgesellschaft
S. Büttgenbach: "Mikromechanik", Teubner Verlag
Final exam
Details
Oral seminar presentation
Minimum standard
Grade 4.0
Exam Type
Oral seminar presentation

Learning goals

Knowledge
Introduction
Micro systems at market
Production principles and strategies
Sensors and actuators
Signal transformation
Materials
Production technologies
Clean room
Lithography, micro structuring
Thermal procsses
Thin film techologies
Construction techniques
Mass production
Design and simulation
MEMSPro - Spice based circuit simulation
ANSYS - Finite element simulation of physical processes
Applications
Micro pump, micro valve, ink jet head
Micro motor
Acceleration sensors, gear rate sensor
Micro cimate sensor
Micro mirror display / digital light processor
Micro sensors in smart phones

Skills
Selection of known micro / nano procduction concepts
strategic integration of mico and nano technologies
structured design and simulation of micro / nano systems
Seminar talk: research, preparation, structuring, presentation
simulation of micro / nano systems
Expenditure classroom teaching
Type Attendance (h/Wk.)
Lecture 2
Exercises (whole course) 0
Exercises (shared course) 0
Tutorial (voluntary) 0
Special literature
keine/none
Special requirements
Physics, Material science
Accompanying material
electronic pdf-script to presentation
electronic design and simulation tools
MEMSPro
Separate exam
Exam Type
discussion (interview) about special issues (szenario, project assignment, literature research)
Details
Presentation of result of literature reseach
Minimum standard
Approve

Learning goals

Knowledge
Presentation structure

Skills
Scientific research tools
Scientific citation
Literatur research to given topic
Structuring, preparation and oral presentation of scientific talk
Expenditure classroom teaching
Type Attendance (h/Wk.)
Seminar 2
Tutorial (voluntary) 0
Special literature
keine/none
Special requirements
Knowlewdge in physics, material science desired
Accompanying material
keine/none
Separate exam
Exam Type
working on projects assignment with your team e.g. in a lab)
Details
Structuring of presentation
Minimum standard
Grade 4.0

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