Long name	Micro and nano systems
Approving CModule	MNST_MaET
Responsible	Prof. Dr. Karl Kohlhof Professor Fakultät IME
Level	Master
Semester in the year	winter semester
Duration	Semester
Hours in self-study	78
ECTS	5
Professors	Prof. Dr. Karl Kohlhof Professor Fakultät IME
Requirements	Basic knowledge of material science desired
Language	German
Separate final exam	Yes

Introduction
Micro systems at market
Production principles and strategies

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Sensors and actuators
Signal transformation
Materials

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Production technologies
Clean room
Lithography, micro structuring
Thermal procsses
Thin film techologies
Construction techniques
Mass production

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Design and simulation
MEMSPro - Spice based circuit simulation
ANSYS - Finite element simulation of physical processes

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Applications
Micro pump, micro valve, ink jet head
Micro motor
Acceleration sensors, gear rate sensor
Micro cimate sensor
Micro mirror display / digital light processor
Micro sensors in smart phones

Selection of known micro / nano procduction concepts

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strategic integration of mico and nano technologies

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structured design and simulation of micro / nano systems

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Seminar talk: research, preparation, structuring, presentation

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simulation of micro / nano systems

Type	Attendance (h/Wk.)
Lecture	2
Exercises (whole course)	0
Exercises (shared course)	0
Tutorial (voluntary)	0

Presentation structure

Scientific research tools

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Scientific citation

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Literatur research to given topic

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Structuring, preparation and oral presentation of scientific talk

Type	Attendance (h/Wk.)
Seminar	2
Tutorial (voluntary)	0